TY  - JOUR
AU  - Terrence Jach
AU  - Joseph Dura
AU  - Nhan Nguyen
AU  - J Swider
AU  - G Cappello
AU  - Curt Richter
C2  - Surface and Interface Analysis
DA  - 2004-01-01 00:01:00
LA  - en
M1  - 36
PB  - Surface and Interface Analysis
PY  - 2004
TI  - Comparative Thickness Measurements of SiO<sub>2</sub>/Si Films for Thicknesses Less than 10 nm
ER  -