TY  - JOUR
AU  - B. Peko
AU  - R. Champion
AU  - MVVS. Rao
AU  - James Olthoff
C2  - Journal of Applied Physics
DA  - 2002-08-01 00:08:00
LA  - en
M1  - 92
PB  - Journal of Applied Physics
PY  - 2002
TI  - Measured cross sections and ion energies for a CHF<sub></sub>3 discharge.
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=9195
ER  -