TY - CONF AU - Richard Cavicchi AU - John Suehle AU - P Chaparala AU - Kenneth Kreider AU - Michael Gaitan AU - Stephen Semancik C2 - Proc., Solid-State Sensor and Actuators Workshop, Hilton Head, SC, USA DA - 1994-12-31 00:12:00 LA - en PB - Proc., Solid-State Sensor and Actuators Workshop, Hilton Head, SC, USA PY - 1994 TI - Micro-Hotplate Gas Sensor ER -