TY - JOUR AU - David Yashar AU - Piotr Domanski C2 - Ashrae Journal DA - 2004-05-01 LA - en PB - Ashrae Journal PY - 2004 TI - MEMS Sensors for HVAC&R UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=860942 ER -