TY  - JOUR
AU  - Bryan Barnes
AU  - Francois Goasmat
AU  - Martin Sohn
AU  - Hui Zhou
AU  - Andras Vladar
AU  - Richard Silver
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2015-02-11
DO  - https://doi.org/10.1117/1.JMM.14.1.014001
LA  - en
M1  - 14
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2015
TI  - Effects of wafer noise on the detection of 20 nm defects using optical volumetric inspection
ER  -