TY  - CONF
AU  - Kevin Lyons
AU  - Michael Postek
C2  - Proceedings of the SPIE Optics and Photonics NanoScience and Engineering Conference 2009, San Diego, CA
DA  - 2009-08-27
LA  - en
PB  - Proceedings of the SPIE Optics and Photonics NanoScience and Engineering Conference 2009, San Diego, CA
PY  - 2009
TI  - A Decade of Commitment from the NIST Manufacturing Engineering Laboratory to Nanomanufacturing and Nanometrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902648
ER  -