TY - JOUR AU - Zachary Levine AU - Thomas Lucatorto AU - Steven Grantham C2 - Applied Optics DA - 2009-04-10 LA - en M1 - 8 PB - Applied Optics PY - 2009 TI - Design considerations for a cascaded grating interferometer suitable for EUV interference lithography UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=842467 ER -