TY  - CONF
AU  - Martin Sohn
AU  - Richard Silver
C2  - International Optical Design Conference 2014, Kohala Coast, HI
DA  - 2014-12-17
DO  - https://doi.org/10.1117/12.2074211
LA  - en
M1  - 9293
PB  - International Optical Design Conference 2014, Kohala Coast, HI
PY  - 2014
TI  - 193 nm scatterfield microscope illumination optics
ER  -