TY  - CONF
AU  - Thomas Germer
AU  - Heather Patrick
AU  - Richard Silver
AU  - Benjamin Bunday
C2  - Metrology, Inspection, and Process Control for Microlithography XXIII, San Jose, CA
DA  - 2009-08-03
LA  - en
PB  - Metrology, Inspection, and Process Control for Microlithography XXIII, San Jose, CA
PY  - 2009
TI  - Developing an Uncertainty Analysis for Optical Scatterometry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901617
ER  -