TY  - JOUR
AU  - Gery Stafford
AU  - O Kongstein
AU  - G Haarberg
C2  - Journal of the Electrochemical Society
DA  - 2006-10-01
LA  - en
M1  - 153
PB  - Journal of the Electrochemical Society
PY  - 2006
TI  - In Situ Stress Measurements During Aluminum Deposition From AlCl(subscript 3)-EtMeImCl
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853371
ER  -