TY - CONF AU - Rick Paul C2 - AIP Conference Proceedings on Characterization and Metrology for ULSI Technology , -1 DA - 2006-11-01 LA - en M1 - 837 PB - AIP Conference Proceedings on Characterization and Metrology for ULSI Technology , -1 PY - 2006 TI - Measurement of Hydrogen in Advanced Materials by Cold Neutron Prompt Gamma-ray Activation Analysis ER -