TY - CONF AU - Joseph Kopanski AU - Muhammad Afridi AU - Chong Jiang AU - Curt Richter C2 - Proc., IEEE International Conference on Microelectronic Test Structures, Oxnard, CA DA - 2009-03-30 LA - en PB - Proc., IEEE International Conference on Microelectronic Test Structures, Oxnard, CA PY - 2009 TI - Test Chip to Evaluate Measurement Methods for Small Capacitances UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901503 ER -