TY  - JOUR
AU  - Joseph Woicik
AU  - M Sahiner
AU  - Timothy Kurp
AU  - Jeffrey Serfass
AU  - Marc Aranguren
C2  - Thin Solid Films
DA  - 2007-10-26
LA  - en
M1  - 515
PB  - Thin Solid Films
PY  - 2007
TI  - Pulsed Laser Deposition and Characterization of Hf-based High-k Dielectric Thin Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854160
ER  -