TY  - JOUR
AU  - John Villarrubia
AU  - Andras Vladar
AU  - Bin Ming
AU  - Regis Kline
AU  - Daniel Sunday
AU  - Jasmeet Chawla
AU  - Scott List
C2  - Ultramicroscopy
DA  - 2015-07-01
DO  - https://doi.org/10.1016/j.ultramic.2015.01.004
LA  - en
M1  - 154
PB  - Ultramicroscopy
PY  - 2015
TI  - Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library
ER  -