TY  - JOUR
AU  - Martin Green
AU  - Andrew Allen
AU  - J. Jordan-Sweet
AU  - Jan Ilavsky
C2  - Journal of Applied Physics
DA  - 2009-06-30
LA  - en
M1  - 105
PB  - Journal of Applied Physics
PY  - 2009
TI  - Annealing Behavior of Atomic Layer Deposited HfO2 Films Studied by Synchrotron X-Ray Reflectivity and Grazing Incidence Small Angle Scattering
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854475
ER  -