TY  - CONF
AU  - James Potzick
C2  - 7638: Metrology, Inspection, and Process Control for Microlithography XXIV, Jan Jose, CA
LA  - en
PB  - 7638: Metrology, Inspection, and Process Control for Microlithography XXIV, Jan Jose, CA
PY  - 1970
TI  - Metrology and process control: dealing with measurement uncertainty
ER  -