TY  - CONF
AU  - Ndubuisi Orji
AU  - Ronald Dixson
AU  - B Bunday
AU  - M Bishop
AU  - Michael Cresswell
AU  - J Allgair
C2  - Proceedings of SPIE, San Jose, CA
DA  - 2007-04-05
LA  - en
M1  - 6518
PB  - Proceedings of SPIE, San Jose, CA
PY  - 2007
TI  - TEM Calibration Methods for Critical Dimension Standards
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823228
ER  -