TY - CONF AU - Ronald Dixson AU - William Guthrie AU - Michael Cresswell AU - Richard Allen AU - Ndubuisi Orji C2 - Proceedings of SPIE, San Jose, CA DA - 2007-04-05 LA - en M1 - 6518 PB - Proceedings of SPIE, San Jose, CA PY - 2007 TI - Single Crystal Critical Dimension Reference Materials (SCCDRM): Process Optimization for the Next Generation of Standards UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823219 ER -