TY  - JOUR
AU  - Mark Sobolewski
C2  - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
DA  - 2000-12-01
LA  - en
M1  - 62
PB  - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
PY  - 2000
TI  - Sheath Model for Radio-Frequency-Biased, High-Density Plasmas, Valid for all &#937;/&#937;<sub>Iota</sub>
ER  -