TY  - JOUR
AU  - Cedric Powell
AU  - Aleksander Jablonski
C2  - Journal of Vacuum Science and Technology A
DA  - 2001-09-01
LA  - en
M1  - 19
PB  - Journal of Vacuum Science and Technology A
PY  - 2001
TI  - Influence of Elastic-Electron Scattering on Measurements of Sillicon Dioxide Film Thicknesses by X-Ray Photoelectron Spectroscopy
ER  -