TY - HEAR AU - Liangchun Yu AU - Kin Cheung AU - Vinayak Tilak AU - Greg Dunne AU - Kevin Matocha AU - Jason Campbell AU - John Suehle AU - Kuang Sheng DA - 2009-12-03 LA - en PY - 2009 TI - Demonstration of a Wafer-level Hall-Mobility Measurement Technique UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905433 ER -