TY  - CONF
AU  - John Woodward
AU  - Theodore Fedynyshyn
AU  - David Astolfi
AU  - Susan Cann
AU  - Michael Leeson
C2  - SPIE Proceedings | Advanced Lithography | 2007 | SPIE
DA  - 2007-03-15
LA  - en
M1  - 6519
PB  - SPIE Proceedings | Advanced Lithography | 2007 | SPIE
PY  - 2007
TI  - Component Segregation in Model Chemically Amplified Resists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=841082
ER  -