TY  - JOUR
AU  - Yvonne Gerbig
AU  - Stephan Stranick
AU  - Robert Cook
C2  - Scripta Materialia
DA  - 2010-06-23
LA  - en
M1  - 63
PB  - Scripta Materialia
PY  - 2010
TI  - Measurement of residual stress field anisotropy at indentations in silicon
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905445
ER  -