TY  - CONF
AU  - Ronnie Fesperman
AU  - M Donmez
AU  - Shawn Moylan
C2  - ASPE 2010 Summer Topical Meeting on Precision Interferometric Metrology, Asheville, NC
DA  - 2010-06-23
LA  - en
M1  - 49
PB  - ASPE 2010 Summer Topical Meeting on Precision Interferometric Metrology, Asheville, NC
PY  - 2010
TI  - Ultra-Precision Linear Motion Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905833
ER  -