TY - JOUR AU - Richard Mirin C2 - Journal of Vacuum Science and Technology B DA - 2010-01-20 LA - en M1 - 28 PB - Journal of Vacuum Science and Technology B PY - 2010 TI - Fabrication of GaAs/AlOx micropillars for small mode volume UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903375 ER -