TY  - CONF
AU  - Joseph Tedesco
AU  - Nadine Gergel-Hackett
AU  - Laurie Stephey
AU  - Christina Hacker
AU  - Curt Richter
C2  - Posters and Presentations (CD), McLean, VA
DA  - 2010-04-29
LA  - en
PB  - Posters and Presentations (CD), McLean, VA
PY  - 2010
TI  - Advanced Capacitance Metrology for Nanoscale Device Characterization
ER  -