TY  - CONF
AU  - Mark
AU  - Richard Silver
AU  - Nien Zhang
AU  - Hui Zhou
AU  - Bryan Barnes
AU  - Bin Ming
AU  - Andras Vladar
AU  - John Villarrubia
C2  - Metrology, Inspection, and Process Control for Microlithography XXIX, San Jose, CA
DA  - 2015-03-19
DO  - https://doi.org/10.1117/12.2175653
LA  - en
M1  - 9424
PB  - Metrology, Inspection, and Process Control for Microlithography XXIX, San Jose, CA
PY  - 2015
TI  - Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression
ER  -