TY  - CONF
AU  - Quandou Wang
C2  - OSA Digest Series, Jackson Hole, WY
DA  - 2010-06-13
LA  - en
PB  - OSA Digest Series, Jackson Hole, WY
PY  - 2010
TI  - A Simple Method to Improve Etching Uniformity when Making Phase Type CGHs on a Thick Glass Substrate
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905044
ER  -