TY  - JOUR
AU  - John Dagata
AU  - Natalia Farkas
AU  - R Ramsier
C2  - Journal of Nanoscience and Nanotechnology
DA  - 2010-07-01
LA  - en
M1  - 10
PB  - Journal of Nanoscience and Nanotechnology
PY  - 2010
TI  - High-voltage Nanoimprint Lithography of Refractory Metal Film
ER  -