TY  - GEN
AU  - Janet Cassard
AU  - Richard Allen
AU  - Craig McGray
AU  - Jon Geist
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2010-09-30
LA  - en
M1  - 115
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2010
TI  - MEMS Young's Modulus and Step Height Measurements with Round Robin Results
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904949
ER  -