TY  - CONF
AU  - David Read
AU  - Roy Geiss
C2  - Vehicle Power and Propulsion Conference 2009 Proceedings, Dearborn, MI
DA  - 2009-01-01
LA  - en
PB  - Vehicle Power and Propulsion Conference 2009 Proceedings, Dearborn, MI
PY  - 2009
TI  - Micrometer-width damascene copper conductors at e10 MA/cm2
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903009
ER  -