TY  - CONF
AU  - David Read
AU  - Roy Geiss
C2  - NSTI Nanotech 2008 Proceedings, Boston, MA
DA  - 2008-01-01
LA  - en
PB  - NSTI Nanotech 2008 Proceedings, Boston, MA
PY  - 2008
TI  - Thermal Cycling of Buried Damascene Copper Interconnect Lines by Joule Heating
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853561
ER  -