TY - CONF AU - Steven Grantham AU - Charles Tarrio C2 - 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Albany, NY DA - 2009-11-01 LA - en M1 - 1173 PB - 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Albany, NY PY - 2009 TI - A Novel Wafer-plane Dosimeter for EUV Lithography ER -