TY - CONF AU - Jun-Feng Song AU - Theodore Vorburger C2 - Proceedings of the 2006 International Symposium on Precision Mechanical Measurements (ISPMM), Urumqi, CH DA - 2006-01-01 00:01:00 LA - en PB - Proceedings of the 2006 International Symposium on Precision Mechanical Measurements (ISPMM), Urumqi, CH PY - 2006 TI - Topography Measurements and Applications ER -