TY  - JOUR
AU  - C Kalnas
AU  - David Read
AU  - J Jones
AU  - G Was
C2  - Thin Solid Films
DA  - 2010-10-04
LA  - en
PB  - Thin Solid Films
PY  - 2010
TI  - Structure and Mechanical Properties of Al Thin Films Synthesized by Electron Beam Evaporation and Ion Beam Assisted Deposition
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851192
ER  -