TY - GEN AU - Ravikiran Attota C2 - Other, National Institute of Standards and Technology, Gaithersburg, MD DA - 2010-01-04 LA - en PB - Other, National Institute of Standards and Technology, Gaithersburg, MD PY - 2010 TI - Nanoscale Measurements With the TSOM Optical Method UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904673 ER -