TY  - SER
AU  - David Seiler
AU  - Alain Diebold
AU  - Thomas Shaffner
AU  - Robert McDonald
AU  - Stefan Zollner
AU  - Rajinder Khosla
AU  - Erik Secula
C2  - American Institute of Physics, Melville, NY
DA  - 2003-09-30
LA  - en
M1  - 683
PB  - American Institute of Physics, Melville, NY
PY  - 2003
TI  - Characterization and Metrology for ULSI Technology: 2003
ER  -