TY  - CONF
AU  - Lin You
AU  - Jungjoon Ahn
AU  - Emily Hitz
AU  - Jonathon Michelson
AU  - Yaw Obeng
AU  - Joseph Kopanski
C2  - Proceedings of the 28th IEEE International Conference on Microelectronic Test Structures, Phoenix, AZ
DA  - 2015-03-23
LA  - en
PB  - Proceedings of the 28th IEEE International Conference on Microelectronic Test Structures, Phoenix, AZ
PY  - 2015
TI  - Electromagnetic Field Test Structure Chip for Back End of the Line Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918005
ER  -