TY  - JOUR
AU  - Michael Postek
AU  - Andras Vladar
C2  - Scanning
DA  - 2011-07-20
LA  - en
M1  - 33
PB  - Scanning
PY  - 2011
TI  - Modeling for Accurate Dimensional Scanning Electron Microscope Metrology: Then and Now
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908153
ER  -