TY - JOUR AU - Konrad Rykaczewski AU - Owen Hildreth AU - Ching Wong AU - Andrei Fedorov AU - John Scott C2 - Advanced Materials DA - 2011-02-01 LA - en M1 - 23 PB - Advanced Materials PY - 2011 TI - Directed 2D-to-3D pattern transfer method for controlled fabrication of topologically complex three- dimensional nanostructures in silicon UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906590 ER -