TY  - CONF
AU  - Ronald Dixson
AU  - Ndubuisi Orji
AU  - James Potzick
AU  - Joseph Fu
AU  - Michael Cresswell
AU  - Richard Allen
AU  - S Smith
AU  - Anthony Walton
C2  - Proceedings of SPIE, Monterey, CA
DA  - 2007-10-01
LA  - en
M1  - 6730
PB  - Proceedings of SPIE, Monterey, CA
PY  - 2007
TI  - Photomask Applications of Traceable Atomic Force Microscope Dimensional Metrology at NIST
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823242
ER  -