TY  - CONF
AU  - John Villarrubia
AU  - Ronald Dixson
AU  - Andras Vladar
C2  - Proc. SPIE Vol. 7638, San Jose, CA
DA  - 2010-03-31
LA  - en
M1  - 7638
PB  - Proc. SPIE Vol. 7638, San Jose, CA
PY  - 2010
TI  - Proximity-associated errors in contour metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905141
ER  -