TY  - CONF
AU  - Ndubuisi Orji
AU  - Ronald Dixson
AU  - Andras Vladar
AU  - Michael Postek
C2  - SPIE NanoScience   Engineering: Instrumentation, Metrology, and Standards for Nanomanufacturing, 
Optics, and Semiconductors V, San Diego, CA
DA  - 2011-09-30
DO  - https://doi.org/10.1117/12.894416
LA  - en
M1  - 8105
PB  - SPIE NanoScience   Engineering: Instrumentation, Metrology, and Standards for Nanomanufacturing, 
Optics, and Semiconductors V, San Diego, CA
PY  - 2011
TI  - Strategies for Nanoscale Contour Metrology using Critical Dimension Atomic Force Microscopy
ER  -