TY - JOUR AU - Ndubuisi Orji AU - Ronald Dixson AU - Aaron Cordes AU - Benjamin Bunday AU - John Allgair C2 - Journal of Micro/Nanolithography, MEMS, and MOEMS DA - 2011-03-08 LA - en M1 - 10 PB - Journal of Micro/Nanolithography, MEMS, and MOEMS PY - 2011 TI - Measurement Traceability and Quality Assurance in a Nanomanufacturing Environment UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906853 ER -