TY - JOUR AU - Charles Tarrio AU - Steven Grantham AU - Shannon Hill AU - Nadir Faradzhev AU - Lee Richter AU - Chester Knurek AU - Thomas Lucatorto C2 - Review of Scientific Instruments DA - 2011-09-30 LA - en M1 - 82 PB - Review of Scientific Instruments PY - 2011 TI - A synchrotron beamline for extreme-ultraviolet photoresist testing UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908231 ER -