TY  - CONF
AU  - Thomas Germer
AU  - Martin Foldyna
AU  - Brent Bergner
C2  - Metrology, Inspection, and Process Control for Microlithography XXV, San Jose, CA
DA  - 2011-04-20
LA  - en
M1  - 7971
PB  - Metrology, Inspection, and Process Control for Microlithography XXV, San Jose, CA
PY  - 2011
TI  - Mueller matrix ellipsometry of artificial non-periodic line edge roughness in presence of finite numerical aperture
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908372
ER  -