TY  - CONF
AU  - Thomas Germer
AU  - Heather Patrick
AU  - Ronald Dixson
C2  - Frontiers of Characterization and Metrology for Nanoelectronics 2011, Grenoble, -1
DA  - 2011-05-26
LA  - en
M1  - 1395
PB  - Frontiers of Characterization and Metrology for Nanoelectronics 2011, Grenoble, -1
PY  - 2011
TI  - A Traceable Scatterometry Measurement of a Silicon Line Grating
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908506
ER  -