TY  - CONF
AU  - Richard Silver
AU  - Nien Zhang
AU  - Bryan Barnes
AU  - Jing Qin
AU  - Hui Zhou
AU  - Ronald Dixson
C2  - Modeling Aspects in Optical Metrology, Munich, -1
DA  - 2011-07-31
LA  - en
M1  - 8083
PB  - Modeling Aspects in Optical Metrology, Munich, -1
PY  - 2011
TI  - A Bayesian Statistical Model for Hybrid Metrology to Improve Measurement Accuracy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908377
ER  -