TY - JOUR AU - Bryan Barnes AU - Ravikiran Attota AU - Richard Quintanilha AU - Martin Sohn AU - Richard Silver C2 - Measurement Science & Technology DA - 2010-12-21 LA - en M1 - 22 PB - Measurement Science & Technology PY - 2010 TI - Characterizing a Scatterfield Optical Platform for Semiconductor Metrology UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905931 ER -