TY - CONF AU - Bryan Barnes AU - Richard Quintanilha AU - Martin Sohn AU - Hui Zhou AU - Richard Silver C2 - SPIE Advanced Lithography, Gaithersburg, MD DA - 2011-04-20 LA - en M1 - 7971 PB - SPIE Advanced Lithography, Gaithersburg, MD PY - 2011 TI - Optical illumination optimization for patterned defect inspection UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908276 ER -